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Canned motor blowers

Positive Displacement Blowers

AERZEN canned motor vacuum blowers are a type of positive displacement blower that comes with a hermetically (HM) sealed drive ideal for the conveyance of aggressive and neutral gases. These vacuum systems are useful in industrial high vacuum technology due to their high power, reliability, and efficiencies.

These vacuum pumps have O-ring seals at the casing flanges for enhanced vacuum tightness and air cooling. Lubrication oil, which can be PFPE oil or mineral oil, is supplied by splash lubrication.

Much like our high vacuum blowers, these vacuum pumps are also fitted with a special rectangular ring-labyrinth-seal form between the bearing and conveying chambers as well as a neutral chamber with condensate channels that you can purge with seal gas for enhanced sealing effect. The hermetically sealed drive surface also ensures the perfect sealing of the drive shaft, eliminating the need for a shaft passage to the atmosphere. This makes it possible to achieve higher rotation speeds.

Enjoy the following characteristics when you choose one of our canned motor vacuum blowers:

  • Excellent variety with four motor variants
  • Highly flexible vacuum components with vertical and horizontal direction of flow
  • High mechanical strength pumps (up to 230 mbar in case of HM)
  • Large control range
  • Low nitrogen and water consumption
  • Reduced pumping down times
  • Suitable for clean room conditions

Use these vacuum pumps in the following industries:

  • Chemical Process Technology
  • Electronics/Semiconductor Instrument Manufacture
  • Flat Screen Production
  • Thin Film Foil and Glass Coating
  • Helium Leak Detection
  • Hydrogen Evacuation
  • Laser Systems Technology
  • Melting Furnaces Manufacture
  • Micro-Electronics
  • Solar Technology
Type of technology
Positive Displacement Blowers
Volume flow
406 to 15,570 m3/h
Medium
air , neutral gases , aggressive gases
Conveying
oil-free
Final vacuum
10^-5 mbar

The reason why manufacturing processes are optimised by a high delta p.

AERZEN Vacuum pumps with HM drive significantly reduce pump down time, which leads to an increase of the output ratio in production. This is a big step towards process optimisation.

Design and construction

AERZEN Vacuum pumps with HM drive are provided with O-ring seals at the casing flanges. Further important advantages of the blower stage are vacuum tightness and air cooling. Lubrication oil is supplied by splash lubrication. Mineral oil can be used as a lubricant, as well as the PFPE oil, generally used in semiconductor technology. This vacuum pumps are equipped with a special rectangular ring-labyrinth-seal between the conveying chamber and the bearing chamber. Additionally, an amply dimensioned neutral chamber with condensate channels is installed. Optionally, the neutral chamber can be purged with seal gas, in order to achieve an increased sealing effect. The hermetically sealed drive ensures the sealing of the drive shaft. A shaft passage to atmosphere can therefore be omitted, making it technically possible to achieve significantly higher rotation speeds.

Neutral or aggressive gases? Aerzen offers solutions for both!

Aerzen vacuum blowers with hermetically sealed drive (HM) are designed for conveying neutral and aggressive gases and find special application in industrial high vacuum technology. Vacuum blowers always work in combination with a backing pump*.

This backing pump starts operating at atmosphere. The vacuum pumps is connected typically at approx. 50 to 200 mbar and the pump down process begins. Depending on the application, liquid ring pumps, sliding vane rotary vacuum pumps or screw vacuum pumps are used as the backing pump. When supplied with AERZEN frequency converters and special parameter sets, operation with the backing pump starting from atmospheric pressure is also possible.

Applications

  • Semiconductor industry
  • Micro-electronics
  • Production of flat screens
  • Laser technology
  • Solar technology
  • Helium leak indicating units
  • Chemical process technology
  • Foil and glass coating
  • Manufacture of melting furnaces
  • Evacuation of hydrogen

*An additional backing pump (HM drive) is always required when using an AERZEN vacuum blower with canned drive.

Information & documents

  • Canned motor blower [G1-093]
    [Product Brochure
    AERZEN Headquarter]

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